คู่มือการใช้งานระบบรวมการตรวจจับอนุภาค HORIBA Reticle/Mask
HORIBA Reticle/Mask Particle Detection Integrated System Specifications Product Name: PD Xpadion Manufacturer: HORIBA Release Year: 2021 Application: Semiconductor reticle/mask particle detection Particle Size Detection: Down to 0.1µm Product Introduction The PD Xpadion is an integrated system designed for detecting particles…