HORIBA SECF-Z53 4MGXN, Z544MGXN Mass Flow Controller/Meter Instruction Manual
HORIBA SECF-Z53 4MGXN, Z544MGXN Mass Flow Controller/Meter .SPECIFICATIONS MODEL SEC(F)-Z534MGX(N) SEC(F)-Z544MGX(N) Full scale #09: 100SLM #10: 200SLM Valve Type Normally Closed under no electricity: C Normally Open under no electricity:…